Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuitĮlectrostatic transducer having optimum sensitivity and dampingĮlectrostatic transducer having narrowed directional characteristic Ultrasonic transducer fabricated as an integral part of a monolithic integrated circuitĮlectret transducer with variable electret foil thickness Ultrasonic transducer for use in a vibratory environment Integrated electroacoustic transducer with built-in bias Process for the manufacture of integrated capacitive transducersĬondenser microphones based on silicon with humidity resistant surface treatmentĮlectroacoustic transducer of the so-called "electret" type, and a method of making such a transducerĮlectrostatic transducer and method of making and using same
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